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ULVAC Technologies
401 Griffin Brook Drive
Methuen, MA 01844 USA
phone: 1-978-686-7550
fax: 1-978-689-6301
email: sales@us.ulvac.com
www.ulvac.com
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ULVAC is an international corporation that designs and manufactures systems for industrial and research applications of vacuum technology. Our products cover a broad spectrum of markets, including specific systems designed for the MEMS industry. These include systems for: DRIE, Ashing systems and a broad portfolio of Sputtering systems.
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