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Oxford Instruments
300 Baker Avenue
Concord, MA 02742 USA
phone: 1-650-593-1611
fax: 1-978-369-8287

Oxford Instruments Plasma Technology

Oxford Instruments offers flexible process tools and leading-edge processes for the engineering of semiconductor structures and devices. Our systems provide solutions for precise materials deposition, etching of nanometre-sized features and controlled growth of nanostructures, based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, ALD, and HVPE.

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