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Oxford Instruments
300 Baker Avenue, Suite 150
Concord, MA 01742 USA
phone: 1-978-369-9933
fax: 1-978-369-8287
www.oxford-instruments.com

We provide flexible tools and processes for precise materials deposition, etching and controlled nanoscale growth. Core technologies include plasma and ion-beam deposition and etch, ALD and HVPE.


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