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Ulvac Technologies, Inc.
401 Griffin Brook Drive
Methuen, MA 01844 USA
phone: 1-978-686-7550
fax: 1-978-689-6301
sales@us.ulvac.com
www.ulvac.com

ULVAC designs and manufactures systems for a wide variety of applications, including specific systems designed for the MEMS industry, including; DRIE and Ashing systems.


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